High Purity Liquid Filtration
Entegris provides a full line of filters to solve a wide variety of contamination control challenges for Point of Use, Point of Tool, Facilities Distribution & Chemical Manufacturing.
Description
Entegris
Entegris provides a full line of filters to solve a wide variety of contamination control challenges for Point of Use, Point of Tool, Facilities Distribution & Chemical Manufacturing. The Entegris liquid filtration line includes well-known brands such as Torrento, Quickchange, Optimizer, Fluorogard, Impact 2, Planargard, Wafergard, Guardian, Protego, Intercept, Microgard & Savana.
These products incorporate membranes such as surface modified Fluoropolymers, PTFE, UPE, PVDF, PES & Polypropylene.
- Wet Etch & Clean – Aggressive Acids & Bases – High Concentrations, Elevated Temperature
- CMP Slurry – Distribution, Point of Use & Point of Tool
- CMP Brushes – reduced defectivity, quicker startup
- CMP Brushes – reduced defectivity, quicker startup
- Photolithography – Developer, Photo Resist, Resist Stripper
- Impact 8G advanced, critical lithography, rapid priming, improves bubble clearance, reduce COO
- Electroplating – Cu & Ni Plating, reduced potential for microbubble formation
- Solvent Filtration – Organic
- DI Water & Ozonated DI
More Info:
- Filtration – Aggressive Acids & Bases
- Quickchange PTFE Filters
- CMP Slurry Filtration
- Optimized Point of Dispense Filtration Solutions For Improved Cost of Ownership in CMP Applications
- Post CMP Cleaning Brushes
- Photochemical Filtration
- Impact 8G & 8GL Photochemical Filters
- Filtration for Cu & Ni Plating Processes
- Ultrapure Filtration for Organic Solvents
- DI Water – High Purity Membranes for Bulk & POU
- Chasing the Perfect Pattern